Wafer Line

• High speed & high volume transportation available (4,000～4,800 pcs/hr).
• Low cost custom build available due to our original manufacturing system.

• Almost no stress to wafers as it has separation action in water tank.
• As 2 lanes are independent, stop time for preparation can be shortened.
• Possible to detect broken wafers.

• Shows excellent cleaning effect by ultrasonic + exclusive chemical solution.
• Low cost custom build available due to our original manufacturing system.

• Equipments such as Diverter, Cassette Inserter, Buffer etc.
  Manufacture Handling Equipments based on customers’ request including line structure, position, installation space etc.

• Features
  • Take out stacked wafers in blister box 1pc by 1pc, then send it out to transportation conveyor. 　
  • Possible to build it into single loader or process line.
  • High speed transportation, stress-free for wafer is available due to Bernoulli gripper adsorption.
  • Possible to add function to detect double wafers.
• Specification
  • Process capability: 1pc/sec
  • Transportation method: X・Y robot
  • Wafer size: 125mm, 156mm
  • Wafer thickness: 140μm～300μm
  • Transportation accuracy: transportation pitch ±2mm

• Features
  • Stacked wafers can be measured. 　
  • Measuring time is within 1 sec. 　
  • Maximum number of wafers measurable is 105 pcs.